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No. 1232 | |||
| Development Status of Extreme Lithography Technologies | ||||
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| Investigating R&D Committee of Extreme Lithography Technologies | ||||
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| Nanofabrication technologies in LSI devices manufacturing have been leading outstanding infrastructure development in information technology world. A major driving force in nanofabrication technologies is great advances in lithography technologies, which fabricate nanometer pattern in the first place. In the Special Investigation Committee of Extreme Lithography Technologies, development status of extreme lithography technologies was investigated considering the great importance of lithography technologies in the period of April 2007 to March 2011. |
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©2007. The Institute of Electrical Engineers of Japan |
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